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콘텐츠 본문

논문 해외 국제전문학술지(SCI급) STRUCTURAL AND OPTICAL PROPERTIES OF A RADIO FREQUENCY MAGNETRON-SPUTTERED ZNO THIN FILM WITH DIFFERENT GROWTH ANGLES

  • 학술지 구분 국제전문학술지(SCI급)
  • 게재년월 2012-01
  • 저자명 정연호공동(제1)
  • 학술지명 NANOSCALE RESEARCH LETTERS
  • 발행처명 springer
  • 발행국가 해외
  • 논문언어 외국어
  • 전체저자수 6

논문 초록 (Abstract)

This study introduces optical properties of a columnar structured zinc oxide [ZnO] antireflection coating for solar cells. We obtained ZnO films of columnar structure on glass substrates using a specially designed radio frequency magnetron sputtering system with different growth angles. Field-emission scanning electron microscopy was utilized to check the growth angles of the ZnO films which were controlled at 0°, 15°, and 30°. The film thickness was fixed at 100 nm to get a constant experiment condition. Grain sizes of the ZnO films were measured by X-ray diffraction. A UV-visible spectrometer was used to measure the transmittance and reflectance of the ZnO film columnar structures as a function of the growth angles.