콘텐츠 본문
논문 국내 국내전문학술지(KCI급) 반응가스 비율에 따른 탄소나노월의 성장특성
- 학술지 구분 국내전문학술지(KCI급)
- 게재년월 2014-12
- 저자명 정연호공동(참여),송우창,황현석,유영식,임윤식,최원석,강현일,김성윤
- 학술지명 전기학회 논문지 P권
- 발행처명 대한전기학회
- 발행국가 국내
- 논문언어 외국어
- 전체저자수 8
논문 초록 (Abstract)
Graphite electrodes are used for secondary batteries, fuel cells, and super capacitors. Research is underway toincreased the reaction area of graphite electrodes used carbon nanotube (CNT) and porous carbon. CNT is limited todevice utilization in order to used a metal catalyst by lack of surface area to improve. In contrast carbon nanowall(CNW) is chemically very stable. So this paper, microwave plasma enhanced chemical vapor deposition (PECVD) systemwas used to grow carbon nanowall (CNW) on Si substrate with methane (CH4) and hydrogen (H2) gases. To find thegrowth properties of CNW according to the reaction gas ratio, we have changed the methane to hydrogen gas ratios(4:1, 2:1, 1:2, and 1:4). The vertical and surficial conditions of the grown CNW according to the gas ratios werecharacterized by a field emission scanning electron microscopy (FE-SEM) and Raman spectroscopy measurementsshowed structure variations.
