콘텐츠 본문
논문 해외 국제전문학술지(SCI급) Synthesis of carbon nanowalls by microwave PECVD for battery electrode
- 학술지 구분 국제전문학술지(SCI급)
- 게재년월 2015
- 저자명 정연호공동(참여),권기백,김형철,신승권,김성윤,강현일,최원석
- 학술지명 Transactions on Electrical and Electronic Materials
- 발행처명 The Korean Institute of Electrical and Electronic Material Engineers
- 발행국가 해외
- 논문언어 외국어
- 전체저자수 7
논문 초록 (Abstract)
The microwave plasma enhanced chemical vapor deposition (PECVD) system was used to grow a carbon nanowall (CNW) on a silicon (Si) substrate with hydrogen (H2) and methane (CH4) gases. To find the growth mechanism of CNW, we increased the growth time of CNW from 5 to 30 min. The vertical and surficial conditions of the grown CNWs according to growth time were characterized by field emission scanning electron microscopy (FE-SEM). Energy dispersive spectroscopy (EDS) measurements showed that the CNWs consisted solely of carbon.
