콘텐츠 본문
논문 해외 국제전문학술지(SCI급) Optimization of selective laser-induced etching (SLE) for fabrication of 3D glass microfluidic device with multi-layer micro channels
- 학술지 구분 국제전문학술지(SCI급)
- 게재년월 2019-12
- 저자명 최지연,김정태,김성일,구치완,정연호공동(참여),안상훈
- 학술지명 Micro and Nano Systems Letters
- 발행처명 Society of Micro and Nano Systems
- 발행국가 해외
- 논문언어 외국어
- 전체저자수 6
논문 초록 (Abstract)
We present the selective laser-induced etching (SLE) process and design guidelines for the fabrication of three-dimensional (3D) microfluidic channels in a glass. The SLE process consisting of laser direct patterning and wet chemical etching uses different etch rates between the laser modified area and the unmodified area. The etch selectivity is an important factor for the processing speed and the fabrication resolution of the 3D structures. In order to obtain the maximum etching selectivity, we investigated the process window of the SLE process: the laser pulse energy, pulse repetition rate, and scan speed. When using potassium hydroxide (KOH) as a wet etchant, the maximum etch rate of the laser-modified glass was obtained to be 166 μm/h, exhibiting the highest selectivity about 333 respect to the pristine glass. Based on the optimized process window, a 3D microfluidic channel branching to three multilayered channels was successfully fabricated in a 4 mm-thick glass. In addition, appropriate design guidelines for preventing cracks in a glass and calibrating the position of the dimension of the hollow channels were studied.
