콘텐츠 본문
논문 해외 국제전문학술지(SCI급) Electrical and Optical Properties of Al-Doped ZnO Transparent Conductive Oxide Films Prepared via Radio Frequency Magnetron Co-Sputtering System
- 학술지 구분 국제전문학술지(SCI급)
- 게재년월 2020-11
- 저자명 정연호공동(제1),박문기,이규민,최원석
- 학술지명 JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
- 발행처명 AMER SCIENTIFIC PUBLISHERS
- 발행국가 해외
- 논문언어 외국어
- 전체저자수 4
논문 초록 (Abstract)
In this study, the optical and electrical properties of a transparent conductive oxide (TCO) film synthesized via the radio frequency (RF) magnetron co-sputtering of Al-doped ZnO (AZO) and ZnO targets on a glass substrate were investigated. In the visible region, the resistivity, transmittance, and carrier concentration of the TCO film are influenced by the ratio of Al doping. The samples were prepared using two targets with the same deposition condition, except several different power levels on an AZO target to obtain different Al compositions in the film. The power range was 100-160 W in 20 W steps on the AZO target with a constant 50 W power level on the ZnO target. The electrical and optical characteristics of the film were measured using several apparatuses. The cross-section of the films was measured with via field emission scanning electron microscopy (FESEM) to determine the thickness of the film. The electrical and optical properties of the AZO films were measured via Hall measurement and UV-visible spectroscopy. The structural characteristics of the AZO films were confirmed by Raman spectroscopy.
