콘텐츠 본문
논문 국내 국제전문학술지(SCI급) Parylene C-AlN Multilayered Thin-Film Passivation for Organic Light-Emitting Diode Using a Single Deposition Chamber
- 학술지 구분 국제전문학술지(SCI급)
- 게재년월 2020-09
- 저자명 Akpeko Gasonoo, 이정환, 임영지, 이승헌, 최윤석 ,이재현
- 학술지명 ELECTRONIC MATERIALS LETTERS
- 발행처명 KOREAN INST METALS MATERIALS
- 발행국가 국내
- 논문언어 외국어
- 전체저자수 6
논문 초록 (Abstract)
Poly-para-xylylene C (Parylene C) and Aluminium Nitride (AlN) multilayered thin films using a single chamber are proposed to achieve transparent passivation for organic light-emitting diodes (OLED). Parylene C-AlN multilayered thin films were obtained through a sequential deposition of Parylene C layers by an optimized chemical vapor deposition as well as deposition of AlN layers by radio frequency reactive sputtering within a short process time at room temperature. An OLED passivated with the thin film showed a significant extension of shelf-life of 400 h at 25 degrees C and 30% RH without any formation of dark spots during the shelf-life analysis, while a reference OLED without any passivation film was degraded within 24 h. In addition, the multilayered passivation films exhibited considerable optical transparency with transmittance greater than 85% in the visible range. This result demonstrates that Parylene C-AlN multilayered films can be successfully deposited within a short time at room temperature in a single chamber for passivation applications in transparent flexible OLEDs and other organic electronic devices.
